婵€鍏夐┍鍔ㄥ厜婧 (LDLS?) 鍙敼杩涘崐瀵间綋璁￠噺鍜屽崐瀵间綋鏉愭枡涓潅璐ㄥ惈閲忕殑 FTIR 娴嬮噺

銆€銆€鍥句竴锛欵nergetiq 鐨勬柊鍨 EQ-77C 瀹藉甫鍏夋簮

銆€銆€婵€鍏夐┍鍔ㄥ厜婧愬彲浼樺寲 FTIR 鎬ц兘

銆€銆€Energetiq 鐨勬縺鍏夐┍鍔ㄥ厜婧 (LDLS?) 浣跨敤婵€鍏夋縺鍙戝苟缁存寔鐩村緞100?m 鈥 320?m鐨勬皺绛夌瀛愪綋銆傜粨鏋滄槸涓€绉嶆瀬鍏舵槑浜殑瀹藉甫杈愬皠鍙戝皠鍣锛岃鐩170nm鑷2400nm鐨勬尝闀胯寖鍥 (DUV-NIR)銆傜敱浜庡畠鏄縺鍏夌淮鎸佺殑锛屽洜姝や寒搴銆佺┖闂寸ǔ瀹氭€у拰瀵垮懡涓嶄細鍍忎紶缁熺瓑绂诲瓙浣撴簮(渚嬪姘欑煭寮х伅)閭ｆ牱鍥犵數鏋佺殑浣跨敤鑰屽彈鍒伴檺鍒銆

銆€銆€鏈€杩锛孍nergetiq 閫氳繃 EQ-77C灏 LDLS 鐨勫彂灏勬尝娈垫墿灞曞埌涓孩澶锛屽鍥1鎵€绀恒€傝繖鏄€氳繃璁捐鍏锋湁涓嶅悓杈撳嚭绐楀彛鏉愭枡鐨勬柊鍨嬪厜鐢垫睜鏉ュ疄鐜扮殑锛屽厑璁镐紶杈撴皺绛夌瀛愪綋鏀剧數骞胯氨浠350nm鍒20渭m(鍙鍏夊埌涓孩澶)銆 EQ-77C鐨勯潪甯稿皬鐨勭瓑绂诲瓙浣撲骇鐢熼珮鍏夎氨杈愬皠鐜囷紝澶х害姣旂儹绾㈠婧(渚嬪 Globar ?)楂樺崄鍊锛屽鍥 2 鎵€绀锛屽苟涓旇〃鐜板嚭楂樻按骞崇殑绌洪棿绋冲畾鎬銆

銆€銆€楂樿緪灏勭巼鍜岀┖闂寸ǔ瀹氭€х殑缁撳悎浣垮厜鑳藉鏈夋晥鍦拌€﹀悎鍒板皬瀛斿緞鍜屽皬鐩村緞鍏夌氦涓銆傚皬绛夌瀛愪綋杩樿繎浼间簬鐐规簮锛岃兘澶熷疄鐜颁綆鍙戞暎瑙掔殑鍑嗙洿锛岃繖瀵逛簬闀垮厜璺暱搴︾殑搴旂敤闈炲父閲嶈銆

銆€銆€鍥 3 鏄剧ず浜 Globar锛屽畠鏄洰鍓嶇敤浜 FTIR 鐨勫吀鍨嬬孩澶栧厜婧銆傚畠鐢辩⒊鍖栫鎴栨爱鍖栫鍒舵垚锛岄€氳繃鐢靛姞鐑嚦1100-1650K 鐨勬俯搴銆傛柊鍨 EQ-77C LDLS 鐨勭洰鏍囧簲鐢ㄦ槸锛

銆€銆€1.鍗婂浣撹閲忓拰杩囩▼鐩戞帶銆

銆€銆€2.鍏夊闀€鑶滆繃绋嬬洃鎺銆

銆€銆€3.姘斾綋鍒嗘瀽銆

銆€銆€4.S-SNOM 鏄惧井闀溿€

銆€銆€鍥 II锛氬叿鏈夋墿灞曚腑绾㈠鍏夎氨杈撳嚭鐨 LDLS 鐨勫厜璋辫緪灏勪寒搴

銆€銆€鍥 III锛1300K 鏃剁殑纰冲寲纭 Globar

銆€銆€鐢ㄤ簬妫€娴嬪崐瀵间綋鍒堕€犺繃绋嬩腑鍏冪礌鎴愬垎鐨 FTIR

銆€銆€鍌呴噷鍙跺彉鎹㈢孩澶 (FTIR) 鍙嶅皠鍏夎氨鏄〃寰佽杽鑶滃寲瀛﹀拰鎴愬垎鐨勯閫夋妧鏈锛屽洜涓哄畠鍏锋湁闈炵牬鍧忔€т互鍙婂鍒嗗瓙閿拰鑷敱杞芥祦瀛愮殑鍑鸿壊鏁忔劅鎬с€傝櫧鐒 FTIR 鍏夎氨宸插箍娉涘簲鐢ㄤ簬鐮斿彂鐜锛屼絾鍏跺湪涓绘祦鐢熶骇璁￠噺鍜屼骇鍝佹櫠鍦嗗伐鑹虹洃鎺т腑鐨勫簲鐢ㄥ巻鏉ュ彈鍒伴檺鍒銆傝繖浜涢檺鍒跺凡閫氳繃 FTIR 鎶€鏈殑涓€绯诲垪涓嶆柇杩涙鑰屾秷闄锛屽寘鎷娇鐢ㄦ柊鐨勫甯︾孩澶栧厜婧銆佹柊鐨勯噰鏍峰厜瀛﹀櫒浠跺拰鍩轰簬妯″瀷鐨勭患鍚堝垎鏋愩€

銆€銆€FTIR 鍏夎氨杩樹负 Epi 鍘氬害銆佹矡妲芥繁搴︽祴閲忎互鍙婅杽鑶(渚嬪楂 k 鍜屼綆 k 鍖栧鎴愬垎)鎻愪緵瀹炴椂瑙ｅ喅鏂规銆傞€氳繃閫忓皠鎴栧弽灏勫厜璋辩殑鍏夊寤烘ā锛屽彲浠ヨ幏寰楁湁鍏崇數瀛愮粨鏋勫拰鍖栧鎴愬垎鐨勪俊鎭锛岀劧鍚庡彲灏嗗叾鐢ㄤ簬杩囩▼鎺у埗鍜岀洃娴銆

銆€銆€瀵逛簬钖勮啘鍘氬害鍦ㄧ嚎鐩戞祴锛屽崐瀵间綋琛屼笟鍘嗘潵鍒╃敤 LDLS 鎶€鏈繘琛屽厜璋辨き鍦嗘祴閲忓拰鍙嶅皠娴嬮噺锛岀壒鍒槸鍦ㄦ矇绉澶囦腑銆傞殢鐫€鍏堣繘灏佽鐨勫揩閫熼噰鐢紝璇ュ簲鐢ㄧ▼搴忕幇宸蹭粠鍓嶇娴佺▼鎵╁睍鍒板悗绔祦绋銆傚崐瀵间綋鍒堕€犺繃绋嬫帶鍒剁殑涓€涓浉瀵硅緝鏂扮殑鏂归潰鏄垚鍒锛屽苟涓 FTIR 姝ｅ湪鑾峰緱骞挎硾閲囩敤銆傞殢鐫€鑺墖鍒堕€犳垚鏈繀閫熷鍔锛岀洃鎺ф瘡涓櫠鍦嗙殑鍘氬害鍜屾垚鍒嗗彉寰楄嚦鍏抽噸瑕銆傞壌浜 EQ-77C LDLS 鐨勫悶鍚愰噺浼樺娍锛岃繖鏄噰鐢 EQ-77C LDLS 鐨勪竴涓叧閿浆鎶樼偣銆

銆€銆€鍥 IV锛氱敤浜庢祴閲忓寲瀛︽垚鍒嗙殑 FTIR 甯冨眬

銆€銆€姒傛嫭

銆€銆€涔嬪墠宸茬粡璇佹槑浜 FTIR 鍏夎氨浠鐢垫睜姘寲纭呭拰闈炴櫠纰崇‖鎺╂ā (ACHM) 涓阿閿殑娴嬮噺鑳藉姏銆傚浜庣數姹犳爱鍖栫锛屽厜璋辫В鍗风Н鍙互鍖哄垎瀵瑰簲浜 Si-N銆丼i-H銆丯H銆丼i-O 鍜 Si-OH 閿殑鍚勪釜宄般€備娇鐢ㄥ熀浜 LDLS 鐨勭孩澶栨簮(浠ｆ浛 SiN Globar)鍙互杩涗竴姝ユ敼杩 FTIR 娴嬮噺鏂规硶銆 LDLS 缁撳悎浜嗚緝楂樼殑杈愬皠搴﹀拰绌洪棿绋冲畾鎬锛屼娇鍏夌嚎鑳藉鏈夋晥鍦拌€﹀悎鍒板皬瀛斿緞涓锛屽苟鎻愰珮浜嗕俊鍣瘮銆